Polysilicon
Introduction
Parameter
1# |
2# |
3# |
4# |
||
Test results |
Type |
N |
N |
P |
P |
Resistivity （Ω·cm） |
90 |
80 |
550 |
500 |
|
Time （us） |
250 |
290 |
|
|
|
O（at/cm3） |
<5.0X1016 |
<5.0X1016 |
|
|
|
C（at/cm3） |
<3.0X1016 |
<2.98X1016 |
|
|
|
Remarks |
Like rods sandwich |
Like rods sandwich |
|
|
|
Technological innovation
The third generation improved Siemens technology, innovative efficient circulation production process, the introduction of the second generation of tail gas recovery system ( CDI ), DCS control system and thermal hydrogenation device, the silicon tetrachloride recycling rate reached more than 99%, can achieve zero emissions standards.